- Source: Remote plasma
A remote plasma (also downstream plasma or afterglow plasma) is a plasma processing method in which the plasma and material interaction occurs at a location remote from the plasma in the plasma afterglow.
See also
Chemical vapor deposition
Corona treatment
Physical vapor deposition
Plasma activation
Plasma chemistry
Plasma cleaning
Plasma-activated bonding
Reactive ion etching
References
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- Api
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- Remote plasma
- Plasma-enhanced chemical vapor deposition
- Plasma afterglow
- Chemical vapor deposition
- Advanced Energy
- Plasma-activated bonding
- Plasma activation
- RCA clean
- KDE Plasma 6
- Nonthermal plasma
