- Source: Surface activated bonding
Surface activated bonding (SAB) is a non-high-temperature wafer bonding technology with atomically clean and activated surfaces. Surface activation prior to bonding by using fast atom bombardment is typically employed to clean the surfaces. High-strength bonding of semiconductor, metal, and dielectric can be obtained even at room temperature.
Overview
In the standard SAB method, wafer surfaces are activated by argon fast atom bombardment in ultra-high vacuum (UHV) of 10−4–10−7 Pa. The bombardment removes adsorbed contaminants and native oxides on the surfaces. The activated surfaces are atomically clean and reactive for formation of direct bonds between wafers when they are brought into contact even at room temperature.
Researches on SAB
The SAB method has been studied for bonding of various materials, as shown in Table I.
The standard SAB, however, failed to bond some materials such as SiO2 and polymer films. The modified SAB was developed to solve this problem, by using a sputtering deposited Si intermediate layer to improve the bond strength.
The combined SAB has been developed for SiO2-SiO2 and Cu/SiO2 hybrid bonding, without use of any intermediate layer.
Technical specifications
References
Kata Kunci Pencarian:
- Surface activated bonding
- Plasma-activated bonding
- Wafer bonding
- Activated carbon
- Direct bonding
- Plasma activation
- Solvent bonding
- Adsorption
- Diffusion bonding
- Dentine bonding agents
- 1
- 2
Diary of a Wimpy Kid: Dog Days (2012)
Bioskop Online, bioskop21, BioskopKeren, Cinemaindo, Comedy, Dewanonton, Drakor ID, DrakorIndo, DramaQu, Dunia21, DutaFilm, Family, Ganool, gudangmovie, IndoXX1, Indoxxi, KorDramas, LayarKaca21, Layarkaca21 INDOXXI, LK21, LK21 XXI, Nonton drama, Nonton Movie, Pahe.in, PusatFilm21, Canada, USA
David Bowers
107 min
Resident Evil: Welcome to Raccoon City (2021)
Action, Bioskop Online, gudangmovie, gudangmovie21, Horror, IndoXX1, KorDramas, LayarKaca21, Layarkaca21 INDOXXI, LK21, Nonton drama, Nonton Movie, Pahe.in, PusatFilm21, Science Fiction, Canada, France, Germany, Japan, United Kingdom, USA
Johannes Roberts, Samantha McMeekin
The Abyss (1989)
Action, Adventure, Bioskop Online, bioskop21, BioskopKeren, Cinemaindo, Dewanonton, Drakor ID, DrakorIndo, DramaQu, Dunia21, DutaFilm, Ganool, gudangmovie, gudangmovie21, IndoXX1, Indoxxi, KorDramas, LayarKaca21, Layarkaca21 INDOXXI, LK21, LK21 XXI, Nonton drama, Nonton Movie, Pahe.in, PusatFilm21, Science Fiction, Thriller, USA
James Cameron
The SpongeBob Movie: Sponge Out of Water (2015)
Adventure, Animation, Bioskop Online, bioskop21, BioskopKeren, Cinemaindo, Comedy, Dewanonton, Drakor ID, DrakorIndo, DramaQu, Dunia21, DutaFilm, Family, Fantasy, Ganool, gudangmovie, gudangmovie21, IndoXX1, Indoxxi, KorDramas, LayarKaca21, Layarkaca21 INDOXXI, LK21, LK21 XXI, Nonton drama, Nonton Movie, Pahe.in, PusatFilm21, Australia, USA
Paul Tibbitt
No More Posts Available.
No more pages to load.
